Silicon 2D Magnetic-field Multisensor

A silicon 2D multisensor measuring simultaneously and independently the in-plane components of the magnetic field is experimentally tested. The devise contains one central ohmic contact and symmetrically to it - two perpendicular to each other pair of ohmic contacts. The sensitivities of the two sensor channels in accordance with symmetry are equal, reaching S=25 V/AT at T=300 κ and S=119 V/AT at T=77 K. The channel cross-sensitivity does not exceed 5% as the internal noise is of the 1/f type.