Micro-displacement Amplifying Mechanism of a Piezoelectric Single Crystal Actuator and Its Motion Characterization

Piezoelectric single crystal actuator is useful in the micro- and nano-scaled. But the range of the operation is limited. The paper presented the amplifying mechanism of the single crystal actuator in order to amplify the output of the piezoelectric actuator in micro- and nano-applications. Due to the single crystal’s expansion when the applied signals decrease, the paper developed the adjustable spring that added to the amplifying mechanism. This paper tested the characteristics of the amplifying mechanism by designed a set of experiment device. The input and output displacement of the amplifying mechanism driven by kinds of signals were measured. It can concluded that the amplifying mechanism achieve the positive and negative displacement response and show its accuracy and stable. These excellent properties of the amplifying mechanism amplify the micro-displacement and expand the operating range of single crystal actuator in micro- and nano-positioning applications.