A 30-MHz, 3-D Imaging, Forward-Looking Miniature Endoscope Based on a 128-Element Relaxor Array

This work describes the design, fabrication, and characterization of a 128-element crossed electrode array in a miniature endoscopic form factor for real-time 3-D imaging. Crossed electrode arrays address some of the key challenges surrounding probe fabrication for 3-D ultrasound imaging by reducing the number of elements required (2N compared with N²). However, there remain practical challenges in packaging a high-frequency crossed electrode array into an endoscopic form factor. A process has been developed that uses a thinly diced strip of flex circuit to bring the back-side connections to common bond surface, which allows the final size of the endoscope to measure only 6 mm ×5 mm. An electrostrictive ceramic composite design was developed for the crossed electrode array. A laser dicing system was used to cut the 1-3 composite as well as etch the array electrode pattern. A single quarter wavelength Parylene matching layer made was vacuum deposited to finish the array. The electrical impedance magnitude of array elements on resonance was measured to be 49 Ω with a phase angle of -55.5°. The finished array elements produced pulses with -6-dB two-way bandwidth of 60% with a 34-MHz center frequency. The average measured electrical crosstalk on the nearest neighboring element and next to nearest neighboring element was -37 and -29 dB, respectively. One- and two-way pulse measurements were completed to confirm the pulse polarity and fast switching speed. Preliminary 3-D images were generated of a wire phantom using the previously described simultaneous azimuth and Fresnel elevation (SAFE) compounding imaging technique.