Rate-Integration Gyroscope (RIG) With Gain Self Calibration

For the purpose of direct angle measurement with high accuracy, this paper focuses on the gain self-calibration of operating modes of MEMS disk gyroscope, when it works in the rate-integration mode. The difference of C/V conversion gain, quality factor and front-end amplifier's gain of gyroscope operating modes will lead to the total gain difference, which causes angle error. Although one-time manual calibration can temporarily reduce the influence of gain difference, environmental factors (e.g. temperature) will interfere with the calibration results. In this paper, a novel self-calibration method is proposed, which detects the gain difference of gyroscope operating modes in real time and compensates it without adding additional circuits. This method is verified using a digital signal processing platform, and the angle dependent bias (ADB) error is reduced from 18 degrees to 2 degrees.