Nonlinear Response of PZT-Actuated Resonant Micromirrors

In this work, we address the modelling of piezo-micromirrors with large opening angles. We focus on various sources of nonlinearites induced by the interaction with the surrounding fluid and by occurrence of geometric large transformations. Specific attention is also devoted to the piezoelectric coupling coefficient. Piezoelectric thin films have gained attention as key materials for the actuation of micro devices since they provide high drive forces, enabling devices with higher performances compared to electrostatic actuation. However they also induce material nonlinearities that cannot be neglected. The model is validated using experimental data obtained for various excitation levels.