Investigation of Superconducting Titanium films for Transition Edge Sensors

High performance transition-edge sensors (TES) require the superconducting thin films with suitable critical temperature ($T_{c}$) for different applications. In this paper, we fabricate and characterize superconducting titanium (Ti) films for a He-3 cryogenic TES system with a sputtering technique. correlation between resistivity and transition temperature has analyzed. The sputtering pressure, power and film thickness are investigated to realize the modulation of $T_{c}$ range from 462 mK to 552 mK.