Stopping Resistance Drift in Phase Change Memory Cells

Phase change memory (PCM) is a high speed, high endurance, high density non-volatile memory technology that utilizes chalcogenide materials such as Ge 2 Sb 2 Te 5 (GST) that can be electrically cycled between highly resistive amorphous and low resistance crystalline phases. The resistance of the amorphous phase of PCM cells increase (drift) in time following a power law [1] , which increases the memory window in time but limits in the implementation of multi-bit-per-cell PCM. There has been a number of theories explaining the origin of drift [1] – [4] , mostly attributing it to structural relaxation, a thermally activated rearrangement of atoms in the amorphous structure [2] . Most of the studies on resistance drift are based on experiments at or above room temperature, where multiple processes may be occurring simultaneously. In this work, we melt-quenched amorphized GST line cells with widths ~120-140 nm, lengths ~390-500 nm, and thickness ~50nm ( Fig. 1 ) and monitored the current-voltage (I-V) characteristics using a parameter analyzer ( Fig. 2 ) in 85 K to 350 K range. We extracted the drift co-efficient from the slope of the resistance vs. time plots (using low-voltage measurements) and observed resistance drift in the 125 K -300 K temperature range ( Fig. 3 ). We found an approximately linear increase in drift coefficient as a function of temperature from ~ 0.07 at 125 K to ~ 0.11 at 200 K and approximately constant drift coefficients in the 200 K to 300 K range ( Fig. 3 inset). These results suggest that structural relaxations alone cannot account for resistance drift, additional mechanisms are contributing to this phenomenon [5] , [6] .