Feasibility on High Frequency Resonant Networks for Induction Heating Superheated Steam Generators for Wafer Cleaning Systems

This study presents a design method of resonant network for the superheated steam (SHS) generator using induction heating (IH) method. In order to generate the pure SHS, a heating object composed of titanium (Ti) grade 2 is used. Thus, to facilitate the IH, the analysis of SHS and Ti-load characteristics should be performed. Based on the analysis results, feasible resonant networks are reviewed and designed in consideration of several conditions for Ti-load. Through the simulation and experimental results of the 2.2-kW prototype for each resonant network, the resonant network suitable for SHS generator is recommended. Finally, the validity of the design method of the resonant network is verified.