Chip-Scale Silicon Ring Resonators for Cryogenic Temperature Sensing

In this article, the temperature behavior of a silicon ring resonator is experimentally investigated for cryogenics. The ring resonator shows a linear sensitivity of 63.9 pm/K in the temperature range from 180 K to 300 K. And the experimental results agree well with the simulated data. The response time of the sensor is investigated by thermal analysis and a fast response of 325 ms is experimentally achieved. In addition, the developed sensor shows high performance in repeatability and stability. Based on our work, for the first time, silicon based ring resonators are applied to cryogenic temperature sensing with the prominent advantages of compactness, chip-scale integration and complementary metal oxide semiconductor (CMOS) compatibility. This work proves that silicon ring resonators are a potential platform for cryogenic monitoring.