Development of Nano Cavities in Aluminum Oxide Membrane for Bioparticle Manipulation by Acoustophoresis Method

For the development of biosensors functioning on single particle sensing principle, the technologies of micro mechanical fluidic devices development as well as particle positioning and control technologies in them need to be available. When developing the mentioned technologies, it is necessary to form the nano/micro cavities to trap or filter bio particles to be used for diagnostics function. In this paper fabrication of the nanoporous aluminum oxide membrane using a custom-made experimental setup with a two-step anodization process is presented. The process of the anodization divided into two-steps: mild anodization and hard anodization. Also finite element models for the analysis of the electrolyte temperature during electrolysis and acoustic pressure distribution and particles motion using acoustophoresis method were created and analysed.