Model of Self-Sensing Microactuator with Embedded Sensor and its Control

Mathematical model of thermoelastic microactuator with embedded intelligence is proposed, together with the possibilities of its control. The microactuator consists of a metal body with arm. The system is heated by direct current passing trough it, which leads to deformation of the arm by stresses of thermoelastic origin. This deformation is controlled by the source current. As the measurement of the deformation is technologically unfeasible, it is carried out indirectly from the actual temperature of the heated body, using a thermal sensor that controls the input voltage.