Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography

This paper discusses the technological prospects for creating a field emitter array for the efficient conversion of electron energy to X-ray radiation in a portable X-ray source. Fabrication process of a field emission array and X-ray transparent beryllium membrane is proposed. Three-dimensional model of field emission array combined with beryllium membrane was created in COMSOL Multiphysics. Dependence of X-ray conversion coefficient vs. voltage between a field-emission array and beryllium membrane was calculated and dependence of electron energy vs. electron beam radius was obtained as a result of electron transport simulation.