Micromachined tunable three-dimensional solid Fabry-Perot etalons

Summary form only given. In summary, we have demonstrated three-dimensional tunable solid Fabry-Ferot etalons fabricated integrally with rotational stages using the surface micromachining technique. A tuning range of 58.5 nm has been achieved by rotating the on chip rotational stage. The three-dimensional Fabry Perot etalons can be integrated with other free-space microoptical elements fabricated by similar techniques.