Realization and actuation of continuous-membrane by an array of 3D self-assembling micro-mirrors for adaptive optics

This paper proposes and experimentally demonstrates a novel technique for the realization and the actuation of continuous-membrane for adaptive optics application. This original device demonstrates, for the first time, both positive and negative deflection with individual pixel displacement of +/- 10 /spl mu/m, which is one order of magnitude larger than in usual approaches. The deformable mirror is constituted by a thin film bulk-micromachined membrane which covers an original set of actuators composed of an array of self-assembling/self-locking 3D polysilicon electrostatic micro-structures.