A 125-KHZ CMOS-MEMS Resoswitch Embedded Zero Quiescent Power OOK/FSK Receiver

This paper demonstrates a 125-kHz micromechanical resoswitch-embedded zero quiescent power OOK/FSK communication receiver based on a CMOS-MEMS fabrication platform for low-frequency (LF) active RFID standby receiver applications. In particular, differing from the previously demonstrated receiver using a CMOS-incompatible Au fabrication process [1], this work utilizes a standard 0.35-μm CMOS process to achieve a folded-beam comb-driven resoswitch with a digital decoder. Enabled by the key component of the resoswitch, the receiver realizes on-chip signal filtering, power amplification, and demodulation, all together consuming an averaged 10.46 μW when processing “1” and zero power for “0” and at standby. This demonstration verifies the efficacy of using low-cost, high-fidelity CMOS processes towards all-mechanical resoswitch-based RF applications.