Simultaneous Refractive Index Sensing Using an Array of Suspended Porous Silicon Membranes

We propose a fast and cost-effective method for obtaining a miniaturized array-formatted sensor suitable for multiplexed detection. Our solution is based on the fabrication of multiple μm-sized suspended porous silicon (PSi) membranes working as independent transducers. Our process can potentially integrate an array of up to 1000 sensing spots per cm². We also propose a simple and user-friendly optical platform to simultaneously interrogate each element of the array in real-time. The feasibility of this idea was proved performing several sensing experiments where we were able to detect refractive index (RI) variations with different transducers at the same time. An average experimental sensitivity of 685 nm/RIU (Refractive Index Unit) was achieved, with a theoretical limit of detection (LoD) of 2·10^-4 RIU. The analyzed sensing spots displayed similar behavior both in time and in magnitude. We believe that the high capabilities of the sensor presented in this work, along with the sensing mechanism, can be very useful for multi-parametric analysis and multi-target detection of biological samples.