Development of a new type tactile sensor using micro electromagnetic coil for human robot

To realize an artificial finger sensing device for a human robot, a new tactile sensor has been developed. Generally the tactile sensor is required to have high reliability, size miniaturization, high sensitivity and wide frequency response. In view of these requirements, a micro electromagnetic coil was proposed as the main tactile component. The coil was a planar spiral thick structure for increasing sensitivity. Micromachining technology for the size miniaturization and for automatic assembling was applied to the micro coil fabrication. The coil, soft rubber and metal plate formed a new type tactile sensor. Ni micro coil of thickness 300 /spl mu/m and diameter 3 mm was fabricated. Using different soft rubber and metal plate, the sense and force characteristics of the tactile sensor were tested. The experimental results show that the microtactile sensor has high sensitivity and wide frequency response.