Study of Inherently Safer Design Strategy Application for IC Process Power Supply System

This study took 11 inherently safer design (ISD) strategies as the main thread. A 12" furnace process tool power supply system ISD was reviewed and studied and the system elements were analyzed according to FMEA. The detailed process of ISD was established. Improvements were made during the annual maintenance period. After the ISD improvement of the actual processing of three batches of 69 wafers of High-K/Poly-Si thin film was validated by SiH₄. The yield results were higher than 90%. Finally, the engineering improvements were implemented at the Hsinchu Science and Industrial Park 12" FAB and facility in Taiwan for safety performance calculation.