Micro mechanical deformation sensor based on ultra sensitive photonic crystal membrane

In the proposed work photonic crystal silicon slab type structure is analyzed with two photonic crystal configuration in line defect with micro cavity in water and air medium for monitoring strain sensing capacities of sensing layer. Pressure is applied and temperature of fluid such as air and water is increased from 21^oC to 31^oC. From the result it is observed that sensing structure shown better sensing capability in air compare to water. Maximum sensitivity of 0.34nm/RIU is obtained with Q factor of 2356 for holes in slab configuration of air medium. Proposed sensor having tremendous application in biomedical systems.