Porous silicon based antireflection coating for the MWIR range

Due to its specific nanostructures and outstanding optical properties, porous silicon is emerging into Micro-Opto-Electro-Mechanical Systems (MOEMS) as optical components for a wide range of applications. Electro-optical/infrared sensors have been developed for a variety of defense and commercial applications. In these applications, high-quality nanostructured antireflective coatings can enhance the performance of such sensors. In this paper, we present a cost-effective multilayer porous silicon antireflective coating for the MWIR range, which can be simply integrated into electro-optical/in-frared sensors.