Phase Change NEMS Relay

Actuation of a highly scalable phase change mechanical relay is demonstrated for the first time. The Phase Change NEMS Relay (PCNR) is a non-volatile relay based on the mechanical expansion of GeTe phase change material. On state resistance was demonstrated to be ~260 Ω and an off state leakage as low as 20 fA was recorded. Switching on and off delay times were demonstrated to be 300 ns and 600 ns, respectively. Scaling analysis shows a path towards 20 nm × 5 nm size devices with an actuation voltage and energy of 500 mV and 70 fJ, respectively.