Athermal Silicon Ring Resonators with TiO2 Hybrid-Polymer Claddings

Thermo-optic coefficients of organic-inorganic hybrid polymers with rutile-TiO2 nanoparticles were carefully estimated using SOI ring resonators. Athermal operation of the SOI ring resonators with TiO2 hybrid-polymer claddings was achieved. The hybrid-polymer cladding can be applied to diverse silicon waveguide structures to control the temperature dependence of silicon photonic devices.