Accurate and Fast Thickness Measurement Technique of MAPbI3 Thin Film

In this work, we report the process of building an accurate ellipsometry model from scratch for benchmark hybrid perovskite MAPbI3. This model can be effectively utilized for a wide range of film thickness measurement. Optical constants from UV to infrared and bandgap of the film were extracted to implement the model. As developed models were evaluated by comparing the measured thicknesses using other direct measurement techniques such as profilometer, cross sectional SEM and AFM. Considering the level of complexity, time required for the measurement, area under measurement, sample preparation and accuracy, a comparison has been presented among different thickness measurement techniques. The process of ellipsometry model building can be used for other noble film with unknown pattern of optical constant with wavelength.