Quantum well intermixing technologies for quasi-phase-matching gratings

Most of the studies carried out to date on the spatial selectively of the quantum well intermixing process have involved characterising either large intermixed areas, or sub 1 /spl mu/m features for 1D and 0D confinement potentials. Features that lie in the range of 1-10 /spl mu/m are of interest because they can be used to realise various devices such as waveguides, and domain disordering for quasi-phase matching (QPM). In this paper different technologies were investigated to fabricate QPM gratings in GaAs/AlAs superlattice waveguides.