Micromachined coplanar waveguides on thin HMDSN-membranes

This paper describes the fabrication of coplanar waveguides on thin dielectric membranes. The membranes deposited from hexamethyldisilazane were fabricated by structuring the underlying silicon with micromachining techniques. A transition from membrane-based coplanar waveguide to silicon-based coplanar waveguide for Ka-band has been designed, fabricated and characterized. A transition from membrane-based coplanar waveguide to rectangular waveguide has been evaluated and realised for D-band.