High Resolution Silicon Nitride Spectrometer by Integrating Micro-Rings and Arrayed Waveguide Gratings in Tandem

We present a compact high-resolution spectrometer on silicon nitride by integrating micro-ring resonators and arrayed waveguide gratings (AWG) in tandem. The integrated spectrometer has an overall size of 1.4×1.1 mm2 and spectral resolution of 0.75nm within the 75nm free spectral range of the secondary AWG.