Design and evaluation of a cylindrical micromixer using ultrasonic vibration in torsional vibration mode

Micromixers which have microchannels for mixing have advantages such as efficient mixing and high temperature controllability. However, microchannels are clogged and a mixing performance is degraded in such micromixer. Therefore, we have proposed a new cylindrical micromixer for the purpose of improving mixing performance by using an ultrasonic vibration. The micromixer oscillates channel plates in a torsional direction. We have evaluated the mixing performance of the fabricated micromixer by Villermaux/Dushman reaction experiments. As a result, the mixing performance of the micromixer has been improved by the ultrasonic vibration.