High-Power and Highly Single-Mode Zn-Diffusion VCSELs at 940 nm Wavelength

We demonstrate Zn-diffusion 940 nm VCSELs, which exhibits high-power (6.8 mW), highly single-mode (SMSR>50 dB) performances over the full range of bias currents. A wide -3-dB E-O bandwidth (18 GHz) and a short rise/fall time (20/11 ps) can also be achieved simultaneously.