Micro-Transfer-Printing – A unique technology for heterogeneous integration of (opto-) electronic components

Advanced sensor systems are required for a lot of new applications like in the area of Internet-of-Things, Industry-4.0, communication, and for Advanced Driver Assistance Systems. Key for such systems is very often the combination of different material systems by heterogeneous integration in order to benefit from the specific material properties. Micro-Transfer-Printing is one of the most promising integration technologies enabling the advanced integration of devices and components of different materials and their processing on wafer level. The integration of optical filters on top of integrated photodiodes or the integration of optical active components using III-V materials are demonstrated.