An influence of linear sizes of the polysilicon piezoresistor on its sensitivity [in pressure sensors]

The influence of linear sizes of the polysilicon piezoresistor on the sensitivity is investigated. The decrease of the transverse sensitivity under the conditions of decreasing the width of the piezoresistor is found and explained by noncomplete transmission of strain from the bottom to the piezoresistor. The numerical value of the characteristic parameter /spl lambda/ for describing the field of strains in the piezoresistor is defined experimentally. As shown in this paper, this parameter equals 1.5 /spl mu/m.