Features of ion-beam synthesis of a diamond-like coating on the surface of steel support plates -elements of microelectronics and robotics

The effect of irradiation with electrically inactive impurity ions (40–130 kV) in the dose range (1–4)•10¹⁶ ions/cm² on hardness, fatigue strength, and elemental composition of the surface of ball bearing steel was studied. A model is proposed for the mechanism of metal surface modification with high-energy ions, which opens up the possibility of increasing the mechanical characteristics of the surface of steel parts.