Investigation of laser-patterned silicon transmittance in the frequency range of 0.1-4.7 THz

The dependence of THz transmittance on the surface roughness of differently laser-patterned silicon was investigated in the frequency range of 0.1-4.7 THz. The scattering of THz waves on rough silicon surface was found as the main mechanism that determines optical losses of laser-ablated silicon. The impact on the THz absorption losses of the silicon processed in ambient air and argon enriched environment was also discussed.