On the Prospects for the Study of a Point Discharge Sustained by a Terahertz Free Electron Laser Radiation in an Inhomogeneous Gas Flow

It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet light for the next-generation projection lithography.