1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)

We report a vacuum-packaged fused-silica (FS) micro birdbath shell resonator gyroscope (BRG) with near-navigation-grade in-run (evaluation duration day) bias stability of 0.0103 deg/h (at room temperature without temperature stabilization). The BRG utilizes a 5mm diameter birdbath (BB) resonator with n=2 wineglass mode f=10.5436 kHz and original frequency split (Δf)=6 Hz:. The BRG is encapsulated in an LCC package and has an excellent Q (1.54 million) and decay time constant (r=46 s) after near mode matching. The performance is believed to be limited by the noise from readout-and-control circuitry. The bias stability of this device is among the best reported values for micro-scale vibratory gyroscopes today.