Ultrathin Radiation Coating Enabling High Accuracy and High Resolution Real-Time Infrared Imaging of Thermal MEMS Devices

An ultrathin radiation coating is invented to modify the surface of MEMS devices for the real-time extraction of high-accuracy and high-resolution infrared (IR) thermography. A testing device is designed and fabricated to identify the accuracy of thermography. The maximum deviation of measured temperature calibrated by thin film sensor is 60°C without radiation coating. In stark contrast, the corresponding error is reduced to less than 1°C with the radiation coating. Meanwhile, this method enables accurate thermography to be obtained in real time, and the feature with a smallest width of 10 μm can be clearly visible in the thermography.