Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation

In this work, we demonstrate, for the first time, a micro-oven-integrated 170 MHz microelectromechanical systems (MEMS) resonator array implemented in a 36°-rotated-Y-Cut lithium niobate on silicon oxide (LN-OX) platform using the fundamental shear horizontal (SH0) mode. The array not only attains a high heating efficiency of 33 K/mW but also exhibits a promising electromechanical coupling coefficient ( kt
²
) of 9.6%, a quality factor ( Q) of 1360, a resulting figure of merit ( FoM=kt
²
·Q) of 130, and a passively-compensated temperature coefficient of frequency (TCF) of 13.8 ppm/K. The design of the individual resonator in the array, namely a weighted 3-electrode resonator with embedded heaters on the suspended busbars, is the key to achieving the high heating efficiency while mitigating spurious modes across a wide frequency span (100-300 MHz).