Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages

This paper presents the best ways for micro-vibration measurement of piezo-driven flexure-guided nanopositioning stages. Based on our previous designed double-circular-hinged flexure-guided stage, the mathematical measurement models are established through physical model simplification and dynamics theory. Then the sensor installation stiffness and interior-stress-free stage fixing are recognized as the key factors for accurate micro-vibration measurement. The different sensors with the different installation modes are adopted for experimental verifications. Based on evaluating the coherence and frequency response functions (FRFs), it is concluded that keeping high sensor installation stiffness, balanced fixing forces on the stage, and suitability of position sensors are the best ways for micro-vibration measurement of flexure-guided stages.