Multi-target tracking for automated RF on-wafer probing based on template matching

This paper presents a vision-based multi-target tracking method for automated on-wafer RF probing. First, a visual servo control framework is introduced to automate the process of alignment for on-wafer RF probing. Second, to obtain accurate poses of the probes and the pads needed during the visual servo control, a visual tracking method based on template matching is proposed. Finally, experimental tests for multi-target tracking and automatic alignment are performed. The results demonstrate that the proposed tracking method can accurately measure poses of the multiple targets even when overlapping occurs. Moreover, automatic alignment of the probe and the pads can be successfully achieved with high accuracy and high robustness.