New generation of SAW devices on advanced engineered substrates combining piezoelectric single crystals and Silicon

This paper describes a new generation of composite substrates dedicated to advanced surface acoustic wave (SAW) devices. For very long years, SAW applications (filtering, resonators, sensing) have been developed on single crystal materials. A competition was still existing with layered substrates using poly-crystals which were never able to overcome standard solutions. The Piezoelectric-On-Insulator (POI) structure which combines highly coupled single crystals with Silicon offers today unique properties to revitalize SAW industry and to give it a major push towards the modern telecommunication competition. This paper resumes the main steps that yields the technique to this edge and puts in perspective the potential of this breakthrough technology.