Displaying Data Effectively Using an Automated Process Dashboard

The concept of Big Data is often used to describe any extremely large set of data and the analytical methods used to derive meaning from it. In semiconductor manufacturing, more sensors are added to manufacturing equipment to capture deeper levels of equipment and process data which gives engineers the opportunity to achieve tighter control of their manufacturing processes. The amount of data is increasing at an exponential rate, but the time available to analyze the data is not. This means engineers must become more efficient in finding the most critical data and responding to out-of-control events. This paper expands on a paper presented at the 2019 Compound Semiconductor Manufacturing Technology Conference in Minneapolis. We present automated data filtering techniques and additional Data Visualization tools that effectively communicate results when data is presented in tables and graphs. We show how we implemented these tools as part of a Process Engineering Dashboard.