Non-uniformity of temperature distribution in ballroom type cleanrooms with FFU systems

The demands of temperature deviation in the semiconductor industry mean that it is critical to ensure that the manufacturing environment is stable. However, the essential nonuniformity problems of temperature distribution in the cleanrooms, especially in ballroom type cleanrooms with fan filter unit (FFU) systems, are rarely noted. This paper aims to investigate the nonuniformity phenomena of temperature distributions in ballroom type cleanrooms with FFU systems. We analyse several factors that cause the temperature deviations and discuss how to control them. By measuring the temperature distributions in the cleanroom and the thermal boundary layer thickness of the various kinds of equipment, the temperature distribution nonuniformity problems in the cleanrooms can be understood and applied to control of the manufacturing environment in the cleanrooms.