Micro Fountain-Like Resonators

This paper presents a novel shell resonator, fountain like resonator (FLR). The FLR is of doughnut shape, anchored at the outer rim to enlarge the bonding or support area. The working mode, wineglass n=2 mode, is generated by the inner rim. Finite element mechanical (FEM) simulation is utilized to analyze the influence of shell size on the resonant frequencies. The foaming process is adopted to fabricated the FLR. The frequency response is obtained by Laser Doppler Vibrometer (LDV), and the wineglass n=2 frequency of this resonator is 50.1kHz. The novel shell resonator with doughnut shape shows potential for gyroscopic application.