A Silicon Photonic MEMS Matrix Switch Using Directional Couplers in Comparison with that Using Adiabatic Couplers

Silicon photonic waveguide matrix switch using ultra-small electrostatic actuators attracts attentions. In this report, a small matrix switch using directional couplers is designed, fabricated and tested. Since the directional coupler (10μm) is shorter than our previous adiabatic coupler (50μm), the size of matrix switch can be decreased. At a coupler gap of 88nm, the port isolation of single switch cell was 12 dB. The switching time was 16 μsec. A 4 × 4 matrix switch was also fabricated and tested.