MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation

Despite recent advances in MEMS vibration energy harvesting and ultra-low power wireless sensors, designing a wireless sensor system entirely powered by a single MEMS device under noisy base excitation has remained a challenge. This paper presents a wireless sensor system co-integrated with a single MEMS piezoelectric vibration energy harvester chip excited by band-limited large amplitude noisy vibration characteristic of an automotive application. The use of soft stoppers in the MEMS package enables the harvesters to operate at an excitation level of 10 g(rms). A custom thick AlN (Aluminum Nitride) piezoelectric process is employed to fabricate the MEMS harvesters with a single MEMS chip generating 179 μW rectified power under these excitation conditions. A low-power wireless sensor module and a receiver module were also designed and demonstrated in this work. Experiments show that the wireless sensor module can be powered solely by the MEMS energy harvester commencing from the cold state. Successful wireless data transmission and receival of sensor data packets are recorded under representative conditions.