An Electrochemical Microseismometer Based on a New Electrolyte System to Improve the Low-Frequency Performances

This paper presents a new electrochemical microseismometer where the viscosity of the electrolyte solution was optimized by supplementation with glycerol. The influence of electrolyte viscosity on the output velocity was studied by finite element software, and the relationship between viscosity and noise levels was analyzed. Next, devices with different proportions of glycerol were fabricated by MEMS process. Finally, the experiment of working bandwidth measurement and the noise test were carried out separately. The experimental results show that: without the frequency compensation, the 3dB bandwidth was expanded by adding glycerol, and the noise levels of the optimized devices were lower than the devices without glycerol at the low-frequency domain.