A Planar Single-Actuator Bi-Stable Switch Based on Latch-Lock Mechanism

Described presently is a micro-fabricated planar bi-stable mechanical switch driven using only one compliant electro-thermal actuator. The state-defining bi-stable mechanism is connected to the actuator via a displacement lever-amplifier and an electrically/thermally insulating linkage structure. More robust state-locking is achieved using a latch-lock rather than the commonly employed buckled-mode mechanism. Realized on a silicon-on-insulator substrate, the device could be switched between the "set" and the "reset" mechanical states with respective actuation-voltage of 11 and 6 V.