Fly-Inspired MEMS Directional Acoustic Sensor for Sound Source Direction

The total internal noise of conventional sound source detection (SSD) comprising of multiple sensors is relatively high, which is their fundamental drawback. This paper reports a novel approach of SSD based on the cosine dependency of each wing of piezoelectric MEMS directional microphone rather than relying on time difference of arrival (TDOA), which will allow continuous monitoring of unwanted noise. The sensor noise is minimized by incorporating a noise minimizing sensing combination made of aluminium nitride (AlN) and D33 mode. The experimentally measured results serve the novelty of this work.