Photomodulated Reflectance Measurement Technique for Implantation Tilt Angle Monitoring

Photo-modulated Reflectivity Measurement (PMR) is an excellent technology for implantation dose and tilt monitoring of as-implanted pre-annealed production wafers. SEMILAB PMR-3000 is an in-line monitoring unit for ion implantation monitoring use prior to the thermal annealing process step. The enhanced optical system ensures the measurement on the whole dose range without insensitive regions in the mid-dose range. Typical dose detectability is <;0.5% (1sigma). The resolution of tilt angle detection is <;0.1° (1sigma). This sensitivity to tilt angle fulfills the requirements of state of the art process control requirements.