Analysis, dynamics, and control of micro-electromechanical systems

Micro- and nano- engineering and science lead to fundamental breakthroughs in the way materials, devices and systems are understood, designed, function, manufactured, and used. High-performance microelectromechanical and nanoelectromechanical systems (MEMS and NEMS), micro- and nano-scale structures and devices will be widely used in nanocomputers, medicine (nanosurgery and nanotherapy, nonrejectable artificial organ design and implants, drug delivery and diagnosis), biotechnology (genome synthesis), etc. This paper reports novel results in developing the micro/nanoelectromechanical theory and illustrates that rapid prototyping can be performed. To demonstrate the capabilities of the analysis and modeling results, high-fidelity integrated 3D+ (three-dimensional geometry dynamics in time domain) data intensive modeling and simulation are performed, and the end-to-end behavior of MEMS and NEMS is studied. This is a significant departure from the conventional 3D modeling. Micro- and nano-scale antennas and ICs are used to control structures and devices, and control problems are solved. This paper provides new directions for detailed, systematic, quantitative, and qualitative pioneering fundamental and applied studies.