Design of a Comparator-Based Silicon Oscillating Accelerometer with a Comprehensive MEMS Model

This paper presents a novel topology for silicon oscillating accelerometer (SOA). The proposed comparator-based SOA improves the low-noise-frequency and enhances the resolution by about 57% compared with the conventional SOA. It has also the more compact topology. Furthermore, this paper presents a model for accelerometer microelectromechanical systems (MEMS) resonator that predicts performance metrics of the accelerometer system at the early stage of the design. The circuit is simulated in 0.18 μm CMOS technology with supply voltage of 1.5V. The simulated resolution of the proposed SOA is 0.4 μg/✓Hz.